It is designed to automate the handling/ transferring process of optical cells in wafer from its cassette to a tester in a cleanroom environment. This handler is built compact with a teaching-friendly wafer transfer robot and is capable of performing wafer tilt check, cassette mapping, wafer alignment and auto focus 2D barcodes/ QR codes reading.
The vacuum type end-effector of the wafer robot is Alumina made with just 2.4mm thickness and its 0.6mm protruding vacuum tip is capable to handle any wafer edges without physical contact on wafer substrates.
The handler is able to be integrated with any testers.
Input/ Output Option | Wafer/Mask |
Package Type | Optical Cells |
Machine Repeatability | ±0.02mm |
Intelligent Features | Wafer Transfer Jig Built-in Deviser with Hepa Filter Wafer Edge Vacuum Edge Handling Auto Focus 2D/ QR Code Reading |